年度重大設備建置:2017年
多功能三維X光顯微影像系統(Multifunctional 3D XCT)
廠牌型號:BRUKER SKYSCAN 2211
Installation Date:2017.12.31.
Multifunctional 3D XCT
- 功能簡介:
- 新型微聚焦X光斷層掃描系統,穿透成像,可對材料/元件/生物組織等進行非破壞性的內部三維結構檢測。搭載臨場樣品載台可協助材料合成反應或動態臨場檢測。
- Instrumental Specification:
- Source:20-190 kV, 4/10/25 W (Diamond Tungsten), submicron spot size, 5-position filter changer
- Flat Panel:3 Mp active pixels CMOS flat panel (1920x1536 pixels)
- CCD:11 Mp cooled CCD (4032x2670 pixels)
- Stage:Direct drive air bearing with integrated micro-positioning stage using piezo-drives
- Detail detectability:100nm
- Scanning volume:Maximum diameter 204 mm, length 200 mm, weight 25 kg
- Image Resolution & Dealing:
- 1920x1920x1160 pixels (FP central)
- 3776x3776x1160 pixels (FP two offset )
- 4032x4032x2272 pixels (CCD central)
- 8000x8000x2272 pixels (CCD two offset )
- Appendix:
- Heating & cooling stage、auto sample loader、Compressive & tensile stage、Helical scan…