年度重大設備建置：2019年
線上前處理高感度離子層析儀 (IC)
廠牌型號：
Metrohm 940 Professional IC Vario
Metrohm 930 Compact IC Flow4
Installation Date：2019.05.31
IC
- 功能簡介：
- 線上基質消除搭配捕捉管技術作為陰陽離子分析
應用於：Slurry、混和酸、有機溶劑… - 線上基質中和搭配陰離子捕捉管分析高鹼類中陰離子不純物質
應用分析於：NaOH、TMAH、鹼類之陰離子不純物質… - 半導體再生水系統微含量溶劑(NMP…)或離子殘留
- Specification：
- 材質：幫浦及管線材質均為化學惰性 PEEK 材質
- 高壓雙活塞幫浦：流速控制範圍 0.01~10 mL/min
- 電導度偵測器：範圍0～15,000μS/cm，電子雜訊 ≦ 0.1nS/cm
- MCS：消除二氧化碳對其它離子測定的干擾，並降低導電度的背景值，增加訊號強度
- MSM：能耐100%有機溶劑
- 管柱恆溫箱：溫度控制範圍0 ～+80 °C
攜帶型雷射誘導擊穿光譜元素分析儀 (Portable Laser Induced Breakdown Spectroscopy, LIBS)
廠牌型號：Applied Photonics LIBS-6
Installation Date：2019.5.31
Portable Laser Induced Breakdown Spectroscopy, LIBS
- 功能簡介：
- 快速全元素分析且無需樣品前處理，提供線上製程與大工件微區元素分析服務。
- Specification：
- ※Laser: 150 mJ (1064 nm) @ 10 Hz – laser pulse energy adjustable from approx. 10% to 100%.
- ※6-channel LIBS module: Includes laser beam expander optics, 6-channel plasma light collection optics (excludes fibre-optics), laser focus adjustment, gas purge, laser interlock circuit.
- ※Integration time: 30 μs – 59 s.
- ※Delay time: Minimum 1.24 microseconds.
- ※CCD: The miniature high-resolution colour camera 1/3-inch 2.5 Megapixel CMOS Sensor 16:9 (1920 x 1080 pixels) is located within the optics array of the LIBSCAN head.
- Spectrometer Resolution：
- a. Approx. 185 nm – 256 nm, DUV detector coating, FWHM = approx. 0.06 nm
- b. Approx. 255 nm – 315 nm, DUV detector coating, FWHM = approx. 0.06 nm
- c. Approx. 314 nm – 416 nm, DUV detector coating, FWHM = approx. 0.09 nm
- d. Approx. 414 nm – 498 nm, FWHM = approx. 0.09 nm
- e. Approx. 496 nm – 718 nm, FWHM = approx. 0.12 nm
- f. Approx. 716 nm – 904 nm, FWHM = approx. 0.2 nm
- Appendix：
- Liquids analysis modular sample chamber